1 to 220 GHz complex permittivity behavior of flexible polydimethylsiloxane substrate

Pierre-Yves Cresson (1, 2) , Yovan Orlic (1) , Jean-François Legier (1) , Erick Paleczny (1) , Luc Dubois (1) , Nicolas Tiercelin (1, 3, 4) , Philippe Coquet (1, 5) , Philippe Pernod (1) , Tuami Lasri (1)

1 IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
2 UA - Université d'Artois
3 LIA LICS/LEMAC - Laboratoire International associé sur les phénomènes Critiques et Supercritiques en électronique fonctionnelle, acoustique et fluidique
4 AIMAN-FILMS - IEMN - Acoustique Impulsionnelle & Magnéto-Acoustique Non linéaire - Fluides, Interfaces Liquides & Micro-Systèmes - IEMN
5 CINTRA / SEEE Nanyang Technological University

Coplanar transmission lines (CPW) are realized on polydimethylsiloxane (PDMS) substrate in order to characterize its complex permittivity, from 1 to 220 GHz. By varying the complex permittivity, the propagation constant of the PDMS-CPW calculated with full wave software is matched to those extracted by de-embedding techniques using S-parameters measurements. The real permittivity evolves from 2.9 to 2.55 while the loss tangent increases slowly to reach 0.048 at 210 GHz.

Mots clés: flexible electronics; millimeter wave; permittivity measurement; polydimethylsiloxane (PDMS); polymer films

Domaines: Matériaux; Micro et nanotechnologies/Microélectronique; Electromagnétisme

Pierre-Yves Cresson, Yovan Orlic, Jean-François Legier, Erick Paleczny, Luc Dubois, et al.. 1 to 220 GHz complex permittivity behavior of flexible polydimethylsiloxane substrate. IEEE Microwave and Wireless Components Letters, 2014, 24 (4), pp.278-280. ⟨10.1109/LMWC.2013.2295230⟩. ⟨hal-00980037⟩