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Statics and dynamics in giant magnetostrictive Tbx/Fe(1-x)/-Fe0.6Co0.4 multilayers for MEMS

Abstract : In the present paper, giant magnetostric-tive thin films have been investigated for future micro-electromechanical systems (MEMS) purposes. For this goal, flexural and torsional motions have been studied in low field anisotropic giant magnetostrictive (GMS) single domain state (SDS) exchange-coupled TbFe/FeCo multilay-ers (ECML). The magnetoelastic (ME) coefficient b γ,2 depend strongly on the ECML structures, compositions, and sputtering deposition parameters. Giant magnetostrictive Multilayers with a high b γ,2 (18M P a for T bF e 2 /F e 0.6 Co 0.4 compared to 11M P a for T bF e 2 /F e) were obtained with or without an in-plane easy axis with a controlled direction, and without any annealing post-process. Dynamical excita-tions of the actuators have been investigated under various conditions. An enhancement up to a factor 5 of the oscillations compared to the TbFe/Fe multilayers is observed with the possibility to tune the flexural/torsional dynami-cal behavior of these cantilevers. The corresponding very large dynamical ME susceptibility of these improved uni-axial ECML gives the possibility to control GMS MEMS with further reduction of the excitation field down to a few oersteds.
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Submitted on : Tuesday, October 20, 2020 - 11:48:54 PM
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J Youssef, N. Tiercelin, F. Petit, H. Le Gall, V. Preobrazhensky, et al.. Statics and dynamics in giant magnetostrictive Tbx/Fe(1-x)/-Fe0.6Co0.4 multilayers for MEMS. IEEE Transactions on Magnetics, Institute of Electrical and Electronics Engineers, 2002, 38 (5), pp.2817-2819. ⟨10.1109/TMAG.2002.803568⟩. ⟨hal-02973224⟩



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