Development of flexible SAW sensors for non-destructive testing of structure
Résumé
In order to accurately examine structures surfaces, it is interesting to use surface SAW (Surface Acoustic Wave). Such waves are well suited for example to detect early emerging cracks or to test the quality of a coating. In addition, when coatings are thin or when emergent cracks are precocious, it is necessary to excite surface waves beyond 10MHz. Finally, when structures are not flat, it makes sense to have flexible or conformable sensors for their characterization. To address this problem, we propose to develop SAW type of interdigital sensors (or IDT for InterDigital Transducer), based on flexible piezoelectric plates. Initially, in order to optimize these sensors, we modeled the behavior of these sensors and identified the optimum characteristic sizes. In particular, the thickness of the piezoelectric plate and the width of the interdigital electrodes have been studied. Secondly, we made composites based on barium titanate foams in order to have flexible piezoelectric plates and to carry out thereafter sensors. Then, we studied several techniques in order to optimize the interdigitated electrodes deposition on this type of material. One of the difficulties concerns the fineness of these electrodes because the ratio between the length (typically several millimeters) and the width (a few tens of micrometers) of electrodes is very high. Finally, mechanical, electrical and acoustical characterizations of the sensors deposited on aluminum substrates were able to show the quality of our achievement.