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On The Necessity of Multiphysics Simulation Experiments in MEMS Teaching

Jinying Zhang 1 Wei-Jiang Xu 2, 3, * Xianmei Wu 4 
* Corresponding author
2 TPIA - IEMN - Transduction, Propagation et Imagerie Acoustique - IEMN
INSA Hauts-De-France - INSA Institut National des Sciences Appliquées Hauts-de-France, IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
Abstract : Microelectromechanical system (MEMS) is an interdisciplinary research and education field. The multiphysics simulation can make the abstract theory on MEMS design concrete and improve the learning efficiency. A MEMS course design is presented in this paper. The content consists of fundamental theory on MEMS design and hands-on simulation experiments. The essence of multiphysics coupling is revealed. Simulation cases are displayed. Teaching approaches are applied in the course design including hands-on simulation experiments, from an easy task to the difficult one and integration of simulation cases and theory lectures. The course design has guiding significance for other science and engineering curriculum design.
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Submitted on : Tuesday, August 9, 2022 - 10:09:06 AM
Last modification on : Tuesday, August 9, 2022 - 10:12:19 AM


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Jinying Zhang, Wei-Jiang Xu, Xianmei Wu. On The Necessity of Multiphysics Simulation Experiments in MEMS Teaching. 2021 IEEE International Conference on Engineering, Technology & Education (TALE), Dec 2021, Wuhan, China. pp.769-773, ⟨10.1109/TALE52509.2021.9678780⟩. ⟨hal-03548801⟩



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