Skip to Main content Skip to Navigation
Journal articles

Vibrational Characteristics Modeling of a PZT5A Mems Resonator Disc Metallized with Alternating Electrical Source

Abstract : With the purpose of integrating new functionalities in micro electro mechanical resonators, frequency response of such resonators has been gained more importance since long time ago. Previous studies have only concentrated on geometries with full metallization and centralized partial metallization. This paper proposes a study of wave propagation, in case of a homogeneous circular disk excited by an AC electrical source with partial annular metallization using Legendre polynomial approach. Our study consists of solving equation of motion and characteristic equations of piezoelectricity with appropriate boundary and continuity conditions. Numerical calculation provides both modal and harmonic analysis, whatever the mode order. In addition to dispersion curves, mechanical and electrical dispersion profiles were presented in a 3D configuration. The impact of varying metallization rates on resonance frequencies is highlighted. The validity of Legendre polynomial method is confirmed through a comparison between polynomial and analytical results provided in the literature.
Complete list of metadata

https://hal-uphf.archives-ouvertes.fr/hal-03560002
Contributor : Mylène Delrue Connect in order to contact the contributor
Submitted on : Monday, February 7, 2022 - 12:05:57 PM
Last modification on : Wednesday, March 23, 2022 - 3:51:35 PM

Links full text

Identifiers

Citation

Ismail Naciri, Abdessamad Rguiti, Lahoucine Elmaimouni, Jean-Etienne Lefebvre, Youssef Belkassmi, et al.. Vibrational Characteristics Modeling of a PZT5A Mems Resonator Disc Metallized with Alternating Electrical Source. International Journal of Mechanical and Production Engineering Research and Development, Transstellar Journal Publications and Research Consultancy Private Limited, 2018, 8 (2), pp.1235-1248. ⟨10.24247/ijmperdapr2018163⟩. ⟨hal-03560002⟩

Share

Metrics

Record views

11