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Study of a dual longitudinal and shear acoustic wave ZnO transducer in the gigahertz frequency range: application to viscosity measurement and first step for device integration

Abstract : In this paper, we study a high frequency (~1GHz) ZnO transducer integrated within a silicon substrate, which generates in the same area, a compressional and a shear acoustic wave. These two kinds of waves can be used to characterize fluid-solid interfaces' properties in the same microscopic area and at the same time from the longitudinal and the shear reflection coefficients. The principle will be explained and validated using RF microprober. With this in mind, the shear and volume viscosity of a drop of water will be presented. Finally, we will propose a first example of electrical matching of the transducer in this high frequency range in order to promote, first, the longitudinal wave.
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Submitted on : Monday, February 21, 2022 - 10:03:06 AM
Last modification on : Wednesday, March 23, 2022 - 3:51:35 PM

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Hatem Dahmani, Julien Carlier, Ibrahim Zaaroura, Malika Toubal, Pierre Campistron, et al.. Study of a dual longitudinal and shear acoustic wave ZnO transducer in the gigahertz frequency range: application to viscosity measurement and first step for device integration. IEEE International Conference on Design & Test of Integrated Micro & Nano-Systems (DTS 2019), Apr 2019, Gammarth-Tunis, Tunisia. pp.1-6, ⟨10.1109/DTSS.2019.8914906⟩. ⟨hal-03582214⟩

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