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Ex-situ sputtering growth and wet etching of lead-ree piezoelectric thin film dedicated for composite pMUT applications

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https://hal-uphf.archives-ouvertes.fr/hal-03582674
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Submitted on : Monday, February 21, 2022 - 1:24:14 PM
Last modification on : Wednesday, March 23, 2022 - 3:51:35 PM

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  • HAL Id : hal-03582674, version 1

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Ahmad Hamieh, Freddy Ponchel, Denis Remiens. Ex-situ sputtering growth and wet etching of lead-ree piezoelectric thin film dedicated for composite pMUT applications. 17th International Workshop on Piezoelectric Materials and Applications in Actuators, IWPMA 2020, Sep 2020, Honnover, Germany. ⟨hal-03582674⟩

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