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Electrical impedance and radiation modes Determination for LiNbO3 MEMS ultrasonic array transducer using KLM and FEM modelling

Abstract : In MEMS realization of high frequency ultrasonic array transducer, electrical impedance matching may become difficult for the reason of the miniaturization of the piezo-array elements. In this study, the electrical impedance of the array elements is estimated first by using KLM model, and then calculated by using finite elements method (FEM), in the case of a LiNbO 3 based 30MHz array transducer. The impedance frequency behavior is related both to the eigen-resonance modes and the electrode driven modes with the free mechanical boundary condition of the element and to the coupling of these modes to the array structure when the element being integrated as the transducer. The array transducer properties and performances such as lateral modes, crosstalk, sensibility and bandwidth, field radiation, focusing/steering are also simulated and analyzed
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https://hal-uphf.archives-ouvertes.fr/hal-03585769
Contributor : Mylène Delrue Connect in order to contact the contributor
Submitted on : Wednesday, February 23, 2022 - 1:42:54 PM
Last modification on : Wednesday, March 23, 2022 - 3:51:35 PM

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Weizhen Wang, Wei-Jiang Xu, Jia Zhou, Wen-Juan Liu, Zheng Xu, et al.. Electrical impedance and radiation modes Determination for LiNbO3 MEMS ultrasonic array transducer using KLM and FEM modelling. 2016 13th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), Oct 2016, Hangzhou, China. pp.688-690, ⟨10.1109/ICSICT.2016.7999012⟩. ⟨hal-03585769⟩

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