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New Optical Approach of SAW Delay Line Characterization

Abstract : Surface acoustic wave devices are usually characterized solely through their electrical parameters. Mechanical displacements can also be numerically computed using finite element software. In this paper, we show that this characterization can be supplemented using an interferometer system capable of measuring out-of-plane mechanical displacement over the entire sensor structure. Conventionally, interferometer imagery is limited to 20MHz, but this work reports the results of the characterization of Rayleigh wave-based SAW sensors operating at a frequency of 78.8 MHz using ultrahigh-frequency scanning laser vibrometry. An overview of the conventional methods used to characterize SAW devices is presented here, as well as a comparison between the results obtained using these methods and laser vibrometry. It is shown that the latter technique also provides access to time-resolved ultrasonic fields over the entire substrate surface and provides an insight into important reflection and divergence phenomena. Comparison with standard network analyzer measurement is shown to assess the performance of Laser Doppler Vibrometry system. Mechanical and electrical characterization and comparison with a model results are presented and discussed. The purpose of this article is to review these latest developments tools in the SAW sensor measurement and present an outlook of the future of these characterizations in the next generation piezo-sensors.
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Contributor : Mylène Delrue Connect in order to contact the contributor
Submitted on : Wednesday, February 23, 2022 - 4:41:34 PM
Last modification on : Wednesday, March 23, 2022 - 3:51:34 PM


Distributed under a Creative Commons Attribution - NonCommercial - NoDerivatives 4.0 International License


  • HAL Id : hal-03586205, version 1


Lyes Djoumi, Nikolay Smagin, Meddy Vanotti, Dame Fall, Etienne Herth, et al.. New Optical Approach of SAW Delay Line Characterization. 30th Eurosensors Conference, EUROSENSORS XXX, Sep 2016, Budapest, Hungary. pp.838-843. ⟨hal-03586205⟩



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