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Poster communications

High voltage excitation and nonlinear transmission of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer

Wen-Juan Liu 1, 2 
2 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN
IEMN-DOAE - Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520
Abstract : This paper reports a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer (PMUT) under high voltage excitation. The proposed PMUT array consists of 44x39 elements fabricated on a silicon-on-insulator (SOI) substrate with 1 μm AlN film on 5 μm silicon membrane. The electrical impedance was 11.6-j30 Ohm at 15.8 MHz resonant frequency in air and 4.72-j25 Ohm at 13.9 MHz when water charged. The LDV measurements showed that the transmission efficiency and the bandwidth for free vibration were 1.7 nm/V and 2.1%, respectively. Nonlinear behavior was observed when increasing the burst amplitude. This strategy is potentially applied to CMOS-compatible high-resolution ultrasonography
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https://hal-uphf.archives-ouvertes.fr/hal-03591183
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Submitted on : Monday, February 28, 2022 - 2:26:25 PM
Last modification on : Wednesday, March 23, 2022 - 3:51:35 PM

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  • HAL Id : hal-03591183, version 1

Citation

Wen-Juan Liu. High voltage excitation and nonlinear transmission of a 16 MHz AlN-based piezoelectric micro-machined ultrasonic transducer. 10ème Edition Franco-Belge du Mardi des Chercheurs, MdC 2019, Mar 2019, Mons, Belgium. ⟨hal-03591183⟩

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