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Lithium Niobate Micro-transducers matrix design

Hala El Rammouz 1 Farouk Benmeddour 1 Jamal Assaad 1 Emmanuel Moulin 1 Lucie Dupont 1 Nikolay Smagin 1 Youssef Zaatar 2 Ziad Herro 2 
1 TPIA - IEMN - Transduction, Propagation et Imagerie Acoustique - IEMN
IEMN-DOAE - Institut d’Électronique, de Microélectronique et de Nanotechnologie - Département Opto-Acousto-Électronique - UMR 8520
Abstract : In this work, a two-dimensional (2D) Lithium Niobate (LiNbO 3 ) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pattern. In contrary to the one element case, this μTs matrix allows to automatically scan a desired structure in real time. The μTs matrix is characterized using an impedance analyzer. Furthermore, the experimental tests carried out in order to demonstrate the matrix functionality at low frequencies [200 - 800] kHz are presented.
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Hala El Rammouz, Farouk Benmeddour, Jamal Assaad, Emmanuel Moulin, Lucie Dupont, et al.. Lithium Niobate Micro-transducers matrix design. 1st International Conference of Engineering Risk (INCER 2019), Apr 2019, Beyrouth, Lebanon. pp.01001, ⟨10.1051/matecconf/201928101001⟩. ⟨hal-03594232⟩

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