Lithium Niobate Micro-transducers matrix design - Université Polytechnique des Hauts-de-France Accéder directement au contenu
Communication Dans Un Congrès Année : 2019

Lithium Niobate Micro-transducers matrix design

Résumé

In this work, a two-dimensional (2D) Lithium Niobate (LiNbO 3 ) 36°Y-cut micro-transducers (μTs) matrix design is presented. Two main steps define the fabrication process: electrode deposition and photolithography. These steps are preceded by the optical mask conception, which defines the 2D matrix pattern. In contrary to the one element case, this μTs matrix allows to automatically scan a desired structure in real time. The μTs matrix is characterized using an impedance analyzer. Furthermore, the experimental tests carried out in order to demonstrate the matrix functionality at low frequencies [200 - 800] kHz are presented.
Fichier principal
Vignette du fichier
matecconf_incer2019_01001.pdf (2.22 Mo) Télécharger le fichier
Origine : Publication financée par une institution
Licence : CC BY - Paternité

Dates et versions

hal-03594232 , version 1 (11-07-2022)

Licence

Paternité

Identifiants

Citer

Hala El Rammouz, Farouk Benmeddour, Jamal Assaad, Emmanuel Moulin, Lucie Dupont, et al.. Lithium Niobate Micro-transducers matrix design. 1st International Conference of Engineering Risk (INCER 2019), Apr 2019, Beyrouth, Lebanon. pp.01001, ⟨10.1051/matecconf/201928101001⟩. ⟨hal-03594232⟩
27 Consultations
54 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More