Skip to Main content Skip to Navigation
Poster communications

Development of SAW-IDT MEMS Sensors for characterization of superficial residual stresses gradient

Document type :
Poster communications
Complete list of metadata

https://hal-uphf.archives-ouvertes.fr/hal-03675937
Contributor : Frédéric Pruvost Connect in order to contact the contributor
Submitted on : Monday, May 23, 2022 - 2:52:30 PM
Last modification on : Tuesday, May 24, 2022 - 3:43:12 AM

Identifiers

  • HAL Id : hal-03675937, version 1

Citation

Marc Duquennoy, Mohammadi Ouaftouh, Julien Deboucq, J.E. Lefebvre, Frédéric Jenot, et al.. Development of SAW-IDT MEMS Sensors for characterization of superficial residual stresses gradient. Symposium on Piezoelectric Micro and Nano Structures and their Applications, Sep 2014, Blois, France. ⟨hal-03675937⟩

Share

Metrics

Record views

7