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Piezoelectrical properties of Pt/Pb(Zr0.53Ti0.47)O3 (PZT) structure deposited on ITO coeted silicon and glass substrates

Abstract : In order to offer an alternative to existing piezoelectric thin films materials structures, we have developed the synthesis of lead zirconate titanate Pb(Zr0.53Ti0.47)O3 (PZT) thin films onto indium-tin-oxide (ITO) coated corning 7059 glass and silicon substrates using an r.f. sputtering deposition process. The perovskite structure of this material has been obtained by controlling the substrate temperature at 500-625°C. We report on the structural properties of the proposed metal-ferroelectric-metal (MFM) structure and present the outcomes of the measurements of the ferroelectric, electrical and piezoelectric properties. We have demonstrated a piezoelectric activity d33 of 100pm/V measured on ITO/PZT/Pt structure reported on silicon and glass substrates, making these structures suitable for integration within MEMS and OEMS devices. As expected for ITO as an electrode, PZT films on both glass and silicon exhibited minimal fatigue. Corning 7059 glass, has a closely matched thermal expansion coefficient to that of Si, so that thin active PZT layers deposited onto ITO/glass can realise a sensor-actuator system that is optically transparent. These can be integrated with silicon device technology to realise some interesting micro-optical applications, such as bio-sensors, optical interconnects, transparent touch panels for interactive device displays and micro-optical switches for example.
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https://hal-uphf.archives-ouvertes.fr/hal-03842623
Contributor : Julie Cagniard Connect in order to contact the contributor
Submitted on : Monday, November 7, 2022 - 4:36:44 PM
Last modification on : Tuesday, November 22, 2022 - 2:26:15 PM

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  • HAL Id : hal-03842623, version 1

Citation

Laid Kerkache, El Hadj Dogheche, Abdelhamid Layadi, Denis Remiens. Piezoelectrical properties of Pt/Pb(Zr0.53Ti0.47)O3 (PZT) structure deposited on ITO coeted silicon and glass substrates. European Materials Research Society Spring Meeting, E-MRS Spring 2015, May 2015, Lille, France. ⟨hal-03842623⟩

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