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Etude et réalisation de MEMS dédiés à la focalisation d'ondes acoustiques UHF par retournement temporel contribuant au développement de dispositifs d'imagerie monotransducteur

Hatem Dahmani 1, 2 
2 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN
INSA Hauts-De-France - INSA Institut National des Sciences Appliquées Hauts-de-France, IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
Abstract : In imaging systems based on the use of ultrasonic waves, the resolution depends strongly on the resonance frequency of the piezoelectric sensors. Thus, to achieve a high resolution, it is necessary to use transducers operating at ultra-high frequency. In addition, the development of multi-element imaging systems with operating frequencies above 100 MHz raises many difficulties such as the technological limitation for the fabrication of small size multi-element sensors, the electrical and mechanical matching problems, as well as the high frequency phase delay system. In this work, we have proposed the study of a microsystem allowing the generation and focusing of ultra-high frequency (1 GHz) acoustic waves by integrating ZnO-based piezoelectric transducers in front of a chaotic silicon cavity. The operating principle of this device is mainly based on the focusing of acoustic waves by the time-reversal technique (TR). The validation of the study is carried out by the exploitation of the signals received on transducers receivers of submillimeter diameter positioned in various points of a pre-defined zone of analysis.
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Submitted on : Tuesday, October 5, 2021 - 11:54:48 AM
Last modification on : Tuesday, July 19, 2022 - 11:48:22 AM
Long-term archiving on: : Thursday, January 6, 2022 - 6:42:13 PM

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Hatem Dahmani. Etude et réalisation de MEMS dédiés à la focalisation d'ondes acoustiques UHF par retournement temporel contribuant au développement de dispositifs d'imagerie monotransducteur. Electronique. Université Polytechnique Hauts-de-France; Institut national des sciences appliquées Hauts-de-France, 2021. Français. ⟨NNT : 2021UPHF0027⟩. ⟨tel-03365385⟩

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