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Etude et réalisation de MEMS dédiés à la focalisation d'ondes acoustiques UHF par retournement temporel contribuant au développement de dispositifs d'imagerie monotransducteur

Abstract : In imaging systems based on the use of ultrasonic waves, the resolution depends strongly on the resonance frequency of the piezoelectric sensors. Thus, to achieve a high resolution, it is necessary to use transducers operating at ultra-high frequency. In addition, the development of multi-element imaging systems with operating frequencies above 100 MHz raises many difficulties such as the technological limitation for the fabrication of small size multi-element sensors, the electrical and mechanical matching problems, as well as the high frequency phase delay system. In this work, we have proposed the study of a microsystem allowing the generation and focusing of ultra-high frequency (1 GHz) acoustic waves by integrating ZnO-based piezoelectric transducers in front of a chaotic silicon cavity. The operating principle of this device is mainly based on the focusing of acoustic waves by the time-reversal technique (TR). The validation of the study is carried out by the exploitation of the signals received on transducers receivers of submillimeter diameter positioned in various points of a pre-defined zone of analysis.
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https://hal-uphf.archives-ouvertes.fr/tel-03365385
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Submitted on : Tuesday, October 5, 2021 - 11:54:48 AM
Last modification on : Tuesday, October 19, 2021 - 5:19:31 PM

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  • HAL Id : tel-03365385, version 1

Citation

Hatem Dahmani. Etude et réalisation de MEMS dédiés à la focalisation d'ondes acoustiques UHF par retournement temporel contribuant au développement de dispositifs d'imagerie monotransducteur. Electronique. Université Polytechnique Hauts-de-France; Institut national des sciences appliquées Hauts-de-France, 2021. Français. ⟨NNT : 2021UPHF0027⟩. ⟨tel-03365385⟩

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