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Réalisation de prototypes pour microsystèmes incluant des micro-transducteurs à base de polymère conducteur pour des applications dans la santé

Lauréline Seurre 1, 2 
2 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN
INSA Hauts-De-France - INSA Institut National des Sciences Appliquées Hauts-de-France, IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
Abstract : Electronically conducting polymers (ECP) are able to reversibly expand and contract in shape/volume in response to an external stimulus, thus called “artificial muscles”. These actuators are also able to generate an electrical signal in response to a mechanical stimulation. Then, they are both actuators and sensors. These active materials represent thus promising candidates for the development of soft microelectromechanical systems (MEMS). This PhD thesis consists of the development and the characterization of ECP-based micro-transducers for the realization of soft microsystems. To meet the needs of some applications, such as micro-robotics for the seizure of an object by a micro-gripper, before integration, the microactuators are characterized in strain and blocking force under direct current voltage. The study of the actuation dynamics provide crucial results to improve the understanding of the material, and to model its operation in order to realize and adequate micro-transducer control for the targeted application. Micro-fabrication techniques, such as photolithography and dry etching, have been used to shape the micro-transducers at sub-millimeter scale for the elaboration of prototypes on flexible chip including the electrical contacts. The developed process allow shaping the micro-transducers in complex configurations. Two prototypes have been developed: a multichannel micro-sensor and a micro-gripper with three fingers (two as actuators, one as sensor) and a wrist (as actuator), to have a haptic feedback in the future. The process effects on the micro-transducers are observed. Indeed, each micro-fabrication step might have an impact on the materials present on the wafer. This study is particularly interesting to determine the potential impacts on the micro-transducers and thus on their ability to perform their actuator and sensor function, which is then studied and compared to those of non-integrated micro-transducers.
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Submitted on : Tuesday, October 19, 2021 - 3:39:33 PM
Last modification on : Tuesday, July 19, 2022 - 11:47:19 AM
Long-term archiving on: : Thursday, January 20, 2022 - 7:27:33 PM


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Lauréline Seurre. Réalisation de prototypes pour microsystèmes incluant des micro-transducteurs à base de polymère conducteur pour des applications dans la santé. Micro et nanotechnologies/Microélectronique. Université Polytechnique Hauts-de-France; Institut National des Sciences Appliquées Hauts-de-France, 2021. Français. ⟨NNT : 2021UPHF0021⟩. ⟨tel-03385747⟩



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