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Contribution au développement de microcomposants pour la caractérisation ultrasonore en canal microfluidique sur silicium : modélisation de la propagation

Abstract : The research activities for the development of microsystems enabled the downsizing of many functions. These multidisciplinary works concerns many applications in the fields of telecommunications, chemistry, and biology. In that context, our work concerned the conception and analyses of acoustical microsystems dedicated to the characterization of the elastic properties of biological samples in a microfluidic channel. We have chosen the use of silicon substrate compatible with heterogeneous integration thanks to microtechnologies. To get a resolution at the scale of the micrometer in water, the frequency of the bulk acoustic waves was chosen around 1 GHz. As the propagation losses are important in that frequency range, a large part of this work was the modeling of the propagation in transmission through the original microsystem developed. Different technological parts that can be fabricated thanks to microtechnologies have been modeled thanks to Finite Element Methods. Modeling made it possible to optimize the geometry of the microsystem including a microfluidic channel for transmission through characterization.
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Submitted on : Friday, November 5, 2021 - 10:32:15 AM
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  • HAL Id : tel-03416217, version 1

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Assane Ndieguene. Contribution au développement de microcomposants pour la caractérisation ultrasonore en canal microfluidique sur silicium : modélisation de la propagation. Micro et nanotechnologies/Microélectronique. Université de Valenciennes et du Hainaut-Cambrésis, 2011. Français. ⟨NNT : 2011VALE0033⟩. ⟨tel-03416217⟩

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