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Theses

Dynamic characterization of the wetting and drying states of DTI (Deep Trench Isolation) structures using high frequency ultrasonic waves

Abbas Salhab 1, 2, 3, 4
3 MAMINA - IEMN - Matériaux et Acoustiques pour MIcro et NAno systèmes intégrés - IEMN
INSA Hauts-De-France - INSA Institut National des Sciences Appliquées Hauts-de-France, IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
4 BIOMEMS - IEMN - Bio-Micro-Electro-Mechanical Systems - IEMN
IEMN - Institut d’Électronique, de Microélectronique et de Nanotechnologie - UMR 8520
Abstract : In the semiconductor industry, effective wet cleaning of contamination is a critical factor in ensuring good quality of electronic products. The cycle between the wetting and drying processes can create several problems in the high aspect ratio micro / nanoscale structures. In this thesis work, we present the characterization of the dynamic wetting of fluids within Deep Trench Isolation (DTI) structures used in STMicroelectronics imaging sensors. This characterization uses an original technique of acoustic waves reflectometry at ultra-high frequencies. In order to obtain cleaning conditions as close as possible to those used in the industrial process, dynamic wetting is provided by a microfluidic channel made of PolyDiMethylSiloxane (PDMS) located at the level of the structures to be studied. An analytical numerical model based on 2D finite difference allowed us to simulate the acoustic interactions inside micro / nanostructures to better interpret the experimental results. In addition, the development of a technique for the automatic acquisition of the acoustic reflection coefficient has made it possible to study the rapid wetting processes of DTI structures. Finally, the kinematics of DTI drying was also studied with different liquids. Structural deformation phenomenon, known as "pattern collapse", was analyzed using scanning electron microscopy (SEM) images and correlated with acoustic measurements.
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Submitted on : Tuesday, May 10, 2022 - 3:40:31 PM
Last modification on : Thursday, May 12, 2022 - 2:59:07 PM

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Abbas Salhab. Dynamic characterization of the wetting and drying states of DTI (Deep Trench Isolation) structures using high frequency ultrasonic waves. Micro and nanotechnologies/Microelectronics. Université Polytechnique Hauts-de-France, 2022. English. ⟨NNT : 2022UPHF0008⟩. ⟨tel-03663964⟩

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