IR spectroscopy Laser pyrolysis Irradiation Raman Radiofrequency magnetron sputtering Friction Liposomes Nanostructuring Rare-earth- doped materials Epitaxy SiC Oxides Silicon nanocrystals Si nanocluster Al2O3 M-lines Sputtering Films Microstructure physics Citric acid Photovoltaic Lifetime Photoluminescence Magnetron sputtering Erbium Reactive magnetron sputtering Refractive index PZT Phase transition FTIR Microstructure Cerium AFM Multilayers Nanostructures Oxide interface Terres rares Energy transfer Structural properties Fluorescence Silicon nitride HR STEM-HAADF CO adsorption Grazing incidence X-ray diffraction Down-conversion Couches minces semi-conductrices Silicon nanoclusters Rare-earth-doped materials Quantum-well Waveguide Nanoparticles XRD Semiconductors Silicium RF magnetron sputtering Luminescence Hillocks Neodymium GENOMIQUE Couches minces Guide d'onde Pulvérisation magnétron radiofréquence Silicon photonics Rare earth Nanostructured materials MoS2 Waveguides Thin films Thin film Matériaux hybrides Electroluminescence Infrared absorption Hafnium silicates Electron paramagnetic resonance Computational electromagnetic methods High-k dielectrics Oxygen vacancies Atom probe tomography Hafnium silicate Raman scattering Pulvérisation cathodique Cathodoluminescence Oxide materials Rare-earth ions Doping Conductivity Feature erasure ADE-FDTD Silicon Resistive Switching Si-rich silicon oxide CoMoS Rare-earth Terbium Rare earths Microstructure physique Nanoparticules Crystal structure Nanostructure Optical amplifiers