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Development of Ultrasonic Surface Acoustic Wave Humidity Sensors

Abstract : In a European project called CUBISM, humidity sensors based on IDT (Inter Digital Transducer) technology are developed for the generation and detection of surface acoustic waves (SAW). These sensors are designed to operate at high temperature (500°C) for monitoring the drying of refractory concrete. Indeed, this humidity monitoring is important because a sudden evaporation of the water during the achievement of the structure could lead to high pressures in the pores implying consequently the destruction of the structure. Thus, the optimization of the concrete drying cycle must be combined with relevant in-situ physical measurements (humidity, pressure, temperature) and thermomechanical modelling. The real-time availability of this physical data via specific sensors integrated into the concrete is therefore a key to effective drying monitoring. Thus, for this project and its specific constraints, we have chosen the development of SAW humidity sensors because they are the most suitable to meet the specifications. In this study, the optimized parameters include the nature of the humidity-sensitive layer, the nature of the piezoelectric substrate, the architecture of the electrode array and finally the electronic measurement setup.
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https://hal-uphf.archives-ouvertes.fr/hal-03480302
Contributor : Mylène Delrue Connect in order to contact the contributor
Submitted on : Tuesday, December 14, 2021 - 3:58:41 PM
Last modification on : Friday, August 5, 2022 - 11:21:47 AM

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Saliou Ndao, Marc Duquennoy, Christian Courtois, Mohammadi Ouaftouh, Mohamed Rguiti, et al.. Development of Ultrasonic Surface Acoustic Wave Humidity Sensors. Instrumentation, Mesure, Métrologie, Lavoisier, 2020, 19 (3), pp.205-210. ⟨10.18280/i2m.190305⟩. ⟨hal-03480302⟩

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